Characteristics of Web coating system.
Vacuum pumping
Differential pumping systems. With gate valves, Lip Seals, baffles
Chamber Overall pumping :
TMP or Diffusion pump with baffle for regulating pumping speed
Coating zone pumping : TMPs
Or separate pumping with large diffusion pump, valves.
Polycold meissner coil , each located inside each zones, below spsuttering cathodes, by 1 Polycold system (200,000 L/S)
According Booster pumps and Direct-Drive Rotary pumps.
Winding system
• AC servo motor driving
• Load-cell tension pickup
-Forward-Reverse winding system.
PRE-TREATMENT SYSTEM
I/R heating system (Halogen Lamp, 20Kw)
Pre-treatment with DC(MF) sputter or
Linear Ion system
Sputtering Cathodes
6 cathodes for ITO , SiO2, TiO2, Nb, Co, Ni (Dual MF, Single DC, Pulse P/S)
IN-SITU MEASUREMENT SYSTEM
by Ohm resistance measuring
by reflective index measuring
These type of sputtering machine can also equipped with evaporation source.